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best sf6 reaction in UKRAINE

best sf6 reaction in UKRAINE

Did anyone have experience in etching SiO2 with SF6 in ICP.The gasese we have are: SF6(0-100sccm), O2(0-20sccm), Ar(0-5sccm), and C4F8. my sample is 3um SiO2 deposited on the surface of Si wafer. The recipe I designed for 3um SiO2 etching is:

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